Christian Peters, Martin Kratz, Jana Köller, Sandra Borzek, Sebastian Simeth
{"title":"Selective laser-induced etching (SLE) of transparent materials for microelectronic components and quantum computing applications","authors":"Christian Peters, Martin Kratz, Jana Köller, Sandra Borzek, Sebastian Simeth","doi":"10.1117/12.2692475","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":"31 S106","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2692475","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}