S. Francés González, Mario Nitzsche, Anuroop Bajpai, A. S. Pranti, Andreas Neudert, Peter Dürr
{"title":"Characterization of MEMS piston mirror arrays with comb drive actuator","authors":"S. Francés González, Mario Nitzsche, Anuroop Bajpai, A. S. Pranti, Andreas Neudert, Peter Dürr","doi":"10.1117/12.3000871","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517784,"journal":{"name":"MOEMS and Miniaturized Systems XXIII","volume":"56 2","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MOEMS and Miniaturized Systems XXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3000871","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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