{"title":"High-quality processing of 4H silicon carbide with ultrashort pulse lasers and pulse tailoring techniques","authors":"Terence Hollister, James M. Bovatsek","doi":"10.1117/12.3003594","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517849,"journal":{"name":"Laser-based Micro- and Nanoprocessing XVIII","volume":" 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser-based Micro- and Nanoprocessing XVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3003594","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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