Sensitivity Improvements for Picosecond Ultrasonic Thickness Measurements in Gold and Tungsten Nanoscale Films

Q1 Engineering
Jiaqi Dong, Chengyuan Yao, Yuanhao Zhu, Shaojie Li, Bowen Liu, Jintao Fan, Chunguang Hu, Youjian Song, Minglie Hu
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提高皮秒超声波测量金和钨纳米薄膜厚度的灵敏度
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来源期刊
Nanomanufacturing and Metrology
Nanomanufacturing and Metrology Materials Science-Materials Science (miscellaneous)
CiteScore
5.40
自引率
0.00%
发文量
36
期刊介绍: Nanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology.Nanomanufacturing and Metrology publishes in the forms including original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically.Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas:• Nano-manufacturing and metrology• Atomic manufacturing and metrology• Micro-manufacturing and metrology• Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing• Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing
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