R. Geiss, Andre Steinbach, M. Younesi, Johannes Mühlenstädt, T. Käsebier, F. Setzpfandt, Thomas Siefke, Thomas Pertsch, Falk Eilenberger
{"title":"Wafer-scale fabrication of low-loss lithium niobate integrated photonic devices","authors":"R. Geiss, Andre Steinbach, M. Younesi, Johannes Mühlenstädt, T. Käsebier, F. Setzpfandt, Thomas Siefke, Thomas Pertsch, Falk Eilenberger","doi":"10.1117/12.3000981","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":517593,"journal":{"name":"Integrated Optics: Devices, Materials, and Technologies XXVIII","volume":"6 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Integrated Optics: Devices, Materials, and Technologies XXVIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.3000981","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}