Linear image sensor with triangular pixel geometry specialized for the light section method
IF 1.1
4区 物理与天体物理
Q4 OPTICS
引用次数: 0
Abstract
We propose a linear image sensor specialized for the light section method to achieve high-speed and low-latency height measurement. This linear image sensor has pixels in the shape of triangles pointing upward and downward, which allows fast data readout and simple data processing of the cross-sectional profile acquisition. We have confirmed the basic feasibility of the sensor by numerical simulation. We also fabricated a prototype of the proposed sensor with 508 pixels. We conducted height measurement of the vertical translate stage and the step pyramid-shaped object and confirmed that the proposed sensor functions as a sensor for light section method.
具有三角形像素几何形状的线性图像传感器，专用于光截面法
摘要 我们提出了一种专门用于光断面法的线性图像传感器，以实现高速、低延迟的高度测量。这种线性图像传感器的像素呈三角形，分别指向上方和下方，因此可以快速读取数据，并对横截面剖面采集进行简单的数据处理。我们通过数值模拟证实了传感器的基本可行性。我们还制作了一个具有 508 个像素的传感器原型。我们对垂直平移台和阶梯金字塔形物体进行了高度测量，证实了所提议的传感器具有光截面法传感器的功能。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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来源期刊
Optical Review
物理-光学
CiteScore
2.30
自引率
0.00%
发文量
62
审稿时长
2 months
期刊介绍：
Optical Review is an international journal published by the Optical Society of Japan. The scope of the journal is:
General and physical optics;
Quantum optics and spectroscopy;
Information optics;
Photonics and optoelectronics;
Biomedical photonics and biological optics;
Lasers;
Nonlinear optics;
Optical systems and technologies;
Optical materials and manufacturing technologies;
Vision;
Infrared and short wavelength optics;
Cross-disciplinary areas such as environmental, energy, food, agriculture and space technologies;
Other optical methods and applications.
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