Study on Thermal Effect on the SEM Contrast of a Nanorod in a Fast Scanning Mode

IF 0.7 4区工程技术 Q3 MATHEMATICS, APPLIED

Journal of Computational and Theoretical Transport Pub Date : 2024-02-19 DOI:10.1080/23324309.2024.2317773

Peng Zhang

引用次数: 0

Abstract

Modern scanning electron imaging (SEM) frequently adopts the multi-frame stacking technique to minimize the vibration and drift but ignores the electron beam-induced thermal effect (called thermal ...

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快速扫描模式下热效应对纳米棒扫描电镜对比度的影响研究

现代扫描电子显微镜（SEM）经常采用多帧堆叠技术，以最大限度地减少振动和漂移，但却忽略了电子束引起的热效应（称为热辐射）。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Computational and Theoretical Transport Mathematics-Mathematical Physics

CiteScore

1.30

自引率

0.00%

发文量

期刊介绍： Emphasizing computational methods and theoretical studies, this unique journal invites articles on neutral-particle transport, kinetic theory, radiative transfer, charged-particle transport, and macroscopic transport phenomena. In addition, the journal encourages articles on uncertainty quantification related to these fields. Offering a range of information and research methodologies unavailable elsewhere, Journal of Computational and Theoretical Transport brings together closely related mathematical concepts and techniques to encourage a productive, interdisciplinary exchange of ideas.