Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots

IF 2.3 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Semiconductor Manufacturing Pub Date : 2023-12-15 DOI:10.1109/TSM.2023.3343633

Andy Ham;Myoung-Ju Park;John Fowler

引用次数: 0

Abstract

This paper studies simultaneous scheduling of production and material transfer that arises in the semiconductor photolithography area. In particular, the right reticle and right job both need to be present to process the job. Jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. This intricate scheduling challenge, encompassing jobs, reticles, machines, and two distinct sets of vehicles, is explored here for the first time. The paper introduces a multi-stage methodology that involves relaxation, a constructive heuristic, constraint programming, and a warm-start approach to address this complex problem.

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工作、工具、机器和两组不同的横向机器人的综合调度

本文研究半导体光刻领域中出现的生产和材料传输同步调度问题。特别是，正确的光栅和正确的作业必须同时出现才能完成作业。作业由一个由车队员工组成的材料处理系统传送。作为辅助资源的光罩也由不同的车辆从一个地方传送到另一个地方。本文首次探讨了这一错综复杂的调度难题，其中包括作业、视网膜、机器和两组不同的车辆。本文介绍了一种多阶段方法，包括松弛、建设性启发式、约束编程和热启动方法，以解决这一复杂问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Semiconductor Manufacturing 工程技术-工程：电子与电气

CiteScore

5.20

自引率

11.10%

发文量

101

审稿时长

3.3 months

期刊介绍： The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.