{"title":"Approach: developing nano/sub-micron diamond slurry technology for enhanced precision polishing of optoelectronic materials","authors":"Biz Mohammed, Vicky Fang, Tong Liu","doi":"10.1117/1.oe.63.1.014106","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509903,"journal":{"name":"Optical Engineering","volume":"117 14","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.oe.63.1.014106","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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