Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

IF 0.4 4区计算机科学 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Communications Technology and Electronics Pub Date : 2023-12-13 DOI:10.1134/s1064226923100078

D. V. Kolodko, A. V. Kaziev, D. G. Ageichenkov, V. Yu. Lisenkov

引用次数: 0

Abstract

A group of high-energy positive O⁺ ions in a plasma flow from a high-current pulsed magnetron discharge with a hot target in an Ar/O₂ gas mixture. The mechanism of occurrence of accelerated O⁺ ions is the conversion of negative ions accelerated in the cathode layer O^– → O⁺ in the processes of charge exchange or ionization by electron impact.

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热靶脉冲磁控管放电中等离子体中的高能正氧离子到基底的通量

在Ar/O2混合气体中，带热靶的大电流脉冲磁控管放电等离子体中存在一组高能正O+离子。加速O+离子发生的机理是在电荷交换或电子冲击电离过程中，阴极层中加速的负离子O -→O+的转化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Communications Technology and Electronics 工程技术-电信学

CiteScore

1.00

自引率

20.00%

发文量

170

审稿时长

10.5 months

期刊介绍： Journal of Communications Technology and Electronics is a journal that publishes articles on a broad spectrum of theoretical, fundamental, and applied issues of radio engineering, communication, and electron physics. It publishes original articles from the leading scientific and research centers. The journal covers all essential branches of electromagnetics, wave propagation theory, signal processing, transmission lines, telecommunications, physics of semiconductors, and physical processes in electron devices, as well as applications in biology, medicine, microelectronics, nanoelectronics, electron and ion emission, etc.