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Frequency Response Analysis of Mems Comb-Drive Resonator Integrated with a Polymer Thin Film Layer

IF 0.9 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC
Electrica Pub Date : 2023-12-06 DOI:10.5152/electrica.2023.23124
S. Tez, M. Kaya
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与聚合物薄膜层集成的 Mems 组合驱动谐振器的频率响应分析
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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来源期刊
Electrica
Electrica Engineering-Electrical and Electronic Engineering
CiteScore
2.10
自引率
0.00%
发文量
59
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