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Modeling, Simulation, and Optimization of Piezoelectrically Actuated Dual-Axis MEMS Accelerometer for Seismic Sensing

IF 2.7 3区 工程技术
Journal of Vibration Engineering & Technologies Pub Date : 2023-10-31 DOI:10.1007/s42417-023-01169-z
G. Nithya, A. Sthuthi, Niroop Chandrashekar, K. Naveen Kumar
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用于地震传感的压电驱动双轴MEMS加速度计的建模、仿真和优化
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Journal of Vibration Engineering & Technologies
Journal of Vibration Engineering & Technologies
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