Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

Q3 Materials Science

Guangxue Jingmi Gongcheng/Optics and Precision Engineering Pub Date : 2023-01-01 DOI:10.37188/ope.20233118.2675

Yunzhuang CHEN, Leijie LAI, Pengzhi LI, Limin ZHU

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引用次数: 0

Abstract

查看原文本刊更多论文

全叶弹簧式空间大行程并联柔性微定位平台及轨迹控制

餈銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝芸楛蝐餃餈銵銝在""和""之间加入""和""。在 "PID "中的 "P "和 "C "中的 "P "是指 "PID"，"C "是指 "PID"，"PID "是指 "PID"。3.23 mm，21.50 mrad，20.30 mrad。

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来源期刊

Guangxue Jingmi Gongcheng/Optics and Precision Engineering Materials Science-Electronic, Optical and Magnetic Materials

CiteScore

2.40

自引率

0.00%

发文量