Cryogenic atom probe tomography and its applications: a review

IF 3.3 3区物理与天体物理 Q2 PHYSICS, CONDENSED MATTER

Superlattices and Microstructures Pub Date : 2023-11-06 DOI:10.20517/microstructures.2023.38

Ziyang Zhou, Zhengquan Wang, Ranming Niu, Pang-Yu Liu, Chao Huang, Yi-Hsuan Sun, Xiutong Wang, Hung-Wei Yen, Julie M. Cairney, Yi-Sheng Chen

引用次数: 0

Abstract

Cryogenic atom probe tomography (cryo-APT) is a new microstructure characterization technique with the potential to address challenges across various research fields. In this review, we provide an overview of the development of cryo-APT and the associated instrumentation that transforms conventional APT into cryo-APT. We start by introducing the APT principle and the instrumentation involved in the cryo-APT workflow, emphasizing the key techniques that enable cryo-APT specimen preparation. Furthermore, we shed light on the research made possible by cryo-APT, presenting several recent outcomes to demonstrate its capabilities effectively. Finally, we discuss the limitations of cryo-APT and summarize the potential research areas that can further benefit from this cutting-edge microstructural characterization technique.

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低温原子探针层析成像及其应用综述

低温原子探针层析成像(cryo-APT)是一种新的微观结构表征技术，具有解决各个研究领域挑战的潜力。在这篇综述中，我们概述了cryo-APT的发展以及将传统APT转化为cryo-APT的相关仪器。我们首先介绍APT原理和参与cryo-APT工作流程的仪器，强调使cryo-APT标本制备的关键技术。此外，我们阐明了cryo-APT使研究成为可能，介绍了几个最近的成果，以有效地展示其能力。最后，我们讨论了cryo-APT的局限性，并总结了这项尖端微结构表征技术的潜在研究领域。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Superlattices and Microstructures 物理-物理：凝聚态物理

CiteScore

6.10

自引率

3.20%

发文量

审稿时长

2.8 months

期刊介绍： Superlattices and Microstructures has continued as Micro and Nanostructures. Micro and Nanostructures is a journal disseminating the science and technology of micro-structures and nano-structures in materials and their devices, including individual and collective use of semiconductors, metals and insulators for the exploitation of their unique properties. The journal hosts papers dealing with fundamental and applied experimental research as well as theoretical studies. Fields of interest, including emerging ones, cover: • Novel micro and nanostructures • Nanomaterials (nanowires, nanodots, 2D materials ) and devices • Synthetic heterostructures • Plasmonics • Micro and nano-defects in materials (semiconductor, metal and insulators) • Surfaces and interfaces of thin films In addition to Research Papers, the journal aims at publishing Topical Reviews providing insights into rapidly evolving or more mature fields. Written by leading researchers in their respective fields, those articles are commissioned by the Editorial Board. Formerly known as Superlattices and Microstructures, with a 2021 IF of 3.22 and 2021 CiteScore of 5.4