206 nm deep ultraviolet laser from fifth harmonic generation of femtosecond fiber laser

None Shi Liang-Zhu, None Zhang Meng, None Chu Yu-Xi, None Liu Bo-Wen, None Hu Ming-Lie
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Abstract

Deep ultraviolet (DUV) femtosecond laser combines the advantages of high single-photon energy of DUV laser and high peak power of femtosecond laser, which is widely used in scientific research, biomedicine, material processing and so on. However, there is a problem in the process of generating DUV femtosecond laser based on nonlinear frequency conversion which the group velocity mismatch caused by dispersion will make the temporal walk-off of the nonlinear frequency conversion larger than the pulse duration of the femtosecond laser, which makes the generation of the DUV femtosecond laser very difficult. In this paper,based on a Yb-doped fiber femtosecond laser, the delay line was optimized to precisely compensate the spatial and temporal walk-off, so DUV femtosecond laser with a center wavelength of 206 nm and a repetition rate of 1 MHz is obtained, whose maximum output power is 102 mW. The maximum conversion efficiency is 4.25% from near infrared to DUV. The RMS power stability is 0.88% within 3 hours, and the peak-to-peak power stability is 3.75%. The evolution of laser spectra and beam quality during the process of second harmonic generation (SHG), FHG and SFG has been systematically studied. The experiment results provide a basis for the generation of DUV femtosecond laser from femtosecond fiber lasers.
飞秒光纤激光器五次谐波产生的206nm深紫外激光器
深紫外飞秒激光结合了深紫外激光单光子能量高和飞秒激光峰值功率高的优点,广泛应用于科学研究、生物医药、材料加工等领域。然而,在基于非线性频率转换的DUV飞秒激光产生过程中存在一个问题,即色散引起的群速度失配会使非线性频率转换的时间漂移大于飞秒激光的脉冲持续时间,这使得DUV飞秒激光的产生非常困难。本文在掺镱光纤飞秒激光器的基础上,对延迟线进行优化,精确补偿时空偏移,得到了中心波长为206 nm、重复频率为1 MHz、最大输出功率为102 mW的DUV飞秒激光器。从近红外到DUV的最大转换效率为4.25%。3小时内的均方根功率稳定性为0.88%,峰间功率稳定性为3.75%。系统地研究了二次谐波产生、FHG和SFG过程中激光光谱和光束质量的演变。实验结果为飞秒光纤激光器产生DUV飞秒激光器提供了依据。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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