Infrared Spectroscopy Study of Edge Water Penetration at Hydrophilic Bonding Interface

Abstract

In this article, we report on the use of a new characterization technique to measure the water penetration at the bonding interfaces and to quantify it. This complements previous studies done using X-ray reflectometry and surface acoustic microscopy: Fourier Transform Infra-Red Multiple Internal Reflection (FTIR-MIR) spectroscopy is used here to characterize the evolutions of contributions of silanols, surface bonded water and free liquid water groups.