21‐4: Elevating the Light Output Power Density of Scaling‐down AlGaN Ultraviolet‐C Micro‐LED

Abstract

Ultraviolet band‐C (UV‐C) micro‐light‐emitting diodes (Micro‐LEDs) with high optical power density are increasingly demanded in the utilization of sterilization, solar‐blind communications, and neuroscience for the robust structure and adjustable emission wavelength. In this work, AlGaN UV‐C Micro‐LEDs are fabricated and characterized in 5×5, 10×10, 20×20, 30×30, 50×50, 80×80, and 100×100 μm2. With pixel size scaling down, the smaller devices have the potential to emit more considerable light output power (LOP) density at the same injected current density. This LOP density sizing effect implies higher luminescence efficiencies on small‐sized UV‐C Micro‐LEDs, which could be widely adopted by the industry.