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Study and Optimization of Piezoelectric Materials for MEMS Biochemical Sensor Applications

Advances in Renewable Energy and Electric Vehicles Pub Date : 1900-01-01 DOI:10.1007/978-981-16-1642-6_32
M. Nagaraj, V. Shantha, N. Nishanth, V. Parthsarathy
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用于MEMS生化传感器的压电材料的研究与优化
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来源期刊
Advances in Renewable Energy and Electric Vehicles
Advances in Renewable Energy and Electric Vehicles
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