Short channel amorphous-silicon TFTs on high-temperature clear plastic substrates [LED display applications]

Abstract

In this paper, we present TFTs with excellent short-channel performance, fabricated at a temperature of 180/spl deg/C on clear plastic substrates. The performance of the TFTs on this clear plastic substrate is as good as that of TFTs made on glass substrates at the same temperature. In contrast to previous work on high temperature plastic substrates, the substrates were freestanding and not mounted to rigid substrates for fabrication, which is critical for maintaining a clean and clear back surface for the optical devices (e.g. OLEDs). These results will enable AMOLED displays on clear plastic substrates.