Thin film resistance temperature sensors on GaAs

ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) Pub Date : 1998-10-05 DOI:10.1109/ASDAM.1998.730209

T. Lalinsky, I. Hotovy, S. Hascik, Z. Mozolova, J. Kuzmík, D. Pogany

引用次数: 3

Abstract

Thin film resistance temperature sensors on GaAs has been developed as an alternative replacement to the temperature sensing Schottky diodes in the power sensor microsystem. Current-voltage and low frequency noise measurements of the temperature sensor have been carried out to analyze the sensor performances. Better noise performance of the resistance sensors compared to the Schottky one has been found.

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砷化镓薄膜电阻温度传感器

基于砷化镓的薄膜电阻温度传感器是功率传感器微系统中温度传感肖特基二极管的替代器件。对温度传感器进行了电流电压和低频噪声测量，分析了传感器的性能。与肖特基电阻传感器相比，电阻传感器具有更好的噪声性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)

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