G. Miller, C. Askins, P. Skeath, C.C. Wang, F.J. Friebele
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引用次数: 6
Abstract
Multi-element sensor arrays of low-r@7ectivi@c, hiTed, apodized, 1 cm long, and 1 nm wide gratings hove been fabricated inter$emmetrically. Once exposed, points along each grating ore re-illuminated with fringeless ullro-violet light to achieve < 1 %flat top ripple in reflectiviw and no sideband to -30 dE.