The influence of piezoceramic actuator on the stator vibrations in traveling wave ultrasonic motor

Abstract

Based on the 3D finite element modeling of the stator in disc-type traveling wave ultrasonic motor, the influence of several kinds of piezoelectric ceramics bonded underneath the surface of the stator on exciting ultrasonic vibrations was investigated. Taken electromechanical coupling effect into account, numerical simulations were carried out by using the ANSYS finite element software package due to the boundary conditions we proposed. Vibration modes, resonance frequencies and voltage-induced displacements were obtained. The calculated results were in good agreement with the experimental data we measured.