High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting

Abstract

This article reports on the performance and long-term stability of MEMS energy harvesters with wafer-level integrated micromagnets and aluminum scandium nitride (AlScN) as piezoelectric transducer layer. Broadband excitation via magnetic plucking is demonstrated with high power outputs of more than $85 \mu \mathrm{W}$ RMS. Furthermore, no significant degradation of the performance was observed after 13 million excitation events by magnetic plucking.