Extraction of modified butterworth — Van Dyke model of FBAR based on FEM analysis

Abstract

This paper presents a methodology for extraction of modified Butterworth-Van Dyke model (mBVD) parameters of thin-film bulk acoustic wave resonator (FBAR) using finite elements method (FEM) analysis. Simple FBAR model is developed and its frequency characteristic is obtained through FEM simulations. Then the mBVD model parameters are calculated and further optimized to fit its frequency response to those from FEM analysis with less than 1% relative error.