Improvement of 300mm FOUP mini-environment

Abstract

Evaluates both mechanical and process characteristics of FOUPs (front opening unifed pods) and improves performance through feedback to suppliers. Issues of FOUPs are as follows.: dimensions; FOUP/LP interoperability; particle contamination; organic contamination; and drying defectiveness We have developed 3-dimensional FOUP measuring equipment with Nikon Instech Co. (Nexiv450N) and measured critical dimensions like wafer teeth height, Y52, and latch key hole position. With the Nexiv450N we could take the dimensions of each FOUP to their nominal values. It's important to align the dimension of the FOUP to realize FOUP/load port interoperability.