Feedback controller design with D stability in silicon-micromachined piston micromirrors

Abstract

In this paper, feedback controller design method, which can adjust the desired time response from pole placement in a specified disk, is proposed to control silicon-micromachined piston micromirror. Each specified disk region considered here provides the different time response. The micromirror system, which is complex nonlinear system, is converted to linear one at considered operation point using linearization method. Then, the relation between optimal control and pole placement constraint, which can be solved to have the controller from discrete-time Riccati equation is constructed. Finally, the simulation results show that our designed controller can achieve complete control of the micromirror system stability, the performance and the desired responses of feedback control.