Low-loss, low-temperature PVD SiN waveguides

Abstract

We report low-temperature (<400˚C) SiN waveguides with lowest propagation losses demonstrated so far for BEOL compatible processes, using a physical vapor deposition technique. Propagation losses as low as 0.2 dB/cm and of 0.43 dB/cm are achieved for single-mode waveguides across the C- and O-band, respectively.