Emerging paradigms in semiconductor manufacturing

Abstract

Four integration trends in semiconductor manufacturing are discussed: simulation-controlled fabricators, integrated process tools, integrated yield management systems, and integrated SMART/microenvironment production lines. Specific examples are used to explain the value of these four technologies in the fab of the 1990s, characterizing these paradigms by short cycle times, high yields, low inventories, high throughput, continuous-flow production, dynamic capacity reconfiguration, high-quality/zero-defect products, tight statistical control, and low cost. It is projected that the causes for accelerating adaptation to this new type of fab will shift the semiconductor paradigms from manual factories to integrated production lines.<>