Fast field solvers for thermal and electrostatic analysis

Abstract

Two different field solver tools have been developed in order to facilitate fast thermal and electro-static simulation of microsystem elements. The /spl mu/S-THERMANAL program is capable of the fast steady-state and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a general field solver based an an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation. Steady-state and dynamic simulation examples demonstrate the usability of the novel tool.