{"title":"Automated Scatterometer for High Quality Optical Surfaces","authors":"Rami Schlair, B. Truax","doi":"10.1364/oft.1984.thdc3","DOIUrl":null,"url":null,"abstract":"The design of an automated scatterometer for production testing of high quality optical surfaces is presented.","PeriodicalId":170034,"journal":{"name":"Workshop on Optical Fabrication and Testing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Workshop on Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1984.thdc3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The design of an automated scatterometer for production testing of high quality optical surfaces is presented.
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