Self-Aligned Carbon Nanotubes for Field Emission Tip with Simple Process

Abstract

Carbon nanotubes (CNTs) is one of the most attractive materials for field emission tip. Because of its low threshold voltage and high current density. In this article we introduce a new simple process to fabricate self-aligned carbon nanotubes for field emission tip with simple process. We can make the less than 200nm diameter hole with our one mask like process by which carbon nanotubes will be self-aligned with the gate layer. And then carbon nanotubes will be catalytically grown in PECVD chamber.