Development of a Distributed Process Mining System for Reactive Ion Etching Enhancement

Abstract

A Distributed Process Mining System (DPMS) is discussed in this paper which aims to optimize the process in order to offer shorter production time, easier quality defect identification and higher customer satisfaction. This proposed system is equipped with the idea of "distributed process mining" discovering the hidden relationships between each working decision in distributed manner. This method incorporates the On-line Analytical Processing (OLAP) and the decision tree-based Artificial Neural Networks (ANNs) algorithms into decision making for ensuring "doing the right things" within the process and relevant workflow. A case study of using Reactive Ion Etching (RIE) in a magnetic head manufacturer is included.