C-V advisor knowledge base (CVA-KB): a high frequency C-V plot analysis tool

Abstract

A high-frequency capacitance-voltage (C-V) plot analysis tool, the CVA-KB, has been developed using an expert system shell. The CVA-KB is designed to be used by semiconductor diffusion engineers and technicians to help solve problems with the interpretation of C-V plots and to suggest a course of action in the solution of diffusion area problems as revealed by C-V analysis. The CVA-KB also aids in the training of C-V plot interpretation by providing a context-sensitive on-line help system.<>