A study of coplanar waveguide on semiconductor substrate

Abstract

An accurate method for evaluating the propagation characteristics of a coplanar waveguide printed on a semiconductor substrate is given. In this method the Green's second identity is used to form an integral equations, which is solved by iterative method without any approximation. The solution of such integral equation gives the depletion layer boundaries as well as the capacitance. The depletion layer capacitance has been used in transmission line model to determine the propagation characteristics. The obtained results are found to be very accurate when compared with published experimental data available in the literature.