Bulk nanocrystalline graphite thin films for piezorezistive sensing applications

Abstract

Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. Several thin films have been grown by PECVD and investigated through various techniques: Raman spectroscopy, electrical characterization, AFM, profilometry and spectroscopic ellipsometry. After a careful analysis of our findings we have weighted the use of the material as a piezoresistive sensor and made a goal for future research.