High quality factor-suspended 1D photonic crystal (Phc) extended cavity for bio-sensing

Abstract

In this paper we report the consistency in controlling the Q-factor value ranging from 1000 to 80,000 together with good free spectral range (FSR) control between the resonance frequencies of between 30 nm to 62 nm of a long cavity based on SOI. The cavities that were considered in this paper ranged from 2 pm to 6 pm in length. The Q-factors for each resonance obtained for that particular extended cavity were measured in different occasion which has 5% variation in the Q- value over a period of times. We expect that the removal of Silica cladding underneath the silicon waveguide will enhance the Q- value due to better optical confinement within the waveguide.