{"title":"Multiscale modelling of MEMS based Pirani gauges","authors":"Prafullkrishna Dani, J. Franz, J. Knoch","doi":"10.1109/SMACD58065.2023.10192174","DOIUrl":null,"url":null,"abstract":"A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.","PeriodicalId":239306,"journal":{"name":"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMACD58065.2023.10192174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.