Resonant cantilever bio sensor with integrated grating readout

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607821

H.I. Ocakli, A. Ozturk, N. Ozber, H. Kavakli, E. Alaca, H. Urey

引用次数: 5

Abstract

Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.

查看原文本刊更多论文

集成光栅读出的谐振悬臂式生物传感器

制作并测试了微悬臂梁生物传感器。其主要特点是简单的单掩模制作、基于光栅的灵敏光学读出、磁性薄膜驱动以及适合并行阵列操作。亚皮图质量检测灵敏度证明。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

自引率

0.00%

发文量