{"title":"Design and fabrication of Si3N4 surface normal photonic crystal filters and reflectors","authors":"F. Chowdhury, X. Ge, Deyin Zhao, Weidong Zhou","doi":"10.1109/NANO.2017.8117435","DOIUrl":null,"url":null,"abstract":"We present the design and fabrication of surface normal photonic crystal high Q Si<inf>3</inf>N<inf>4</inf> filter on quartz and high performance SÌ3N4 suspended reflectors at near infrared. We report a Si<inf>3</inf>N<inf>4</inf> filter on quartz with a quality factor of over 27000. We also report a 99% peak reflection from fabricated Si<inf>3</inf>N<inf>4</inf> reflectors with reflection band of 20 nm.","PeriodicalId":292399,"journal":{"name":"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2017.8117435","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present the design and fabrication of surface normal photonic crystal high Q Si3N4 filter on quartz and high performance SÌ3N4 suspended reflectors at near infrared. We report a Si3N4 filter on quartz with a quality factor of over 27000. We also report a 99% peak reflection from fabricated Si3N4 reflectors with reflection band of 20 nm.
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