Cathodoluminescent Properties of polycrystalline Ga2O3 thin film and its application UV flat panel light source

Abstract

Polycrystalline gallium oxide thin film was prepared using electron-beam evaporation and a post-annealing treatment. Cathodoluminescent measurement show the gallium oxide thin film has emission peaks ranging from 300 to 650 nm. Using gallium oxide thin film anode, a flat panel UV light source was fabricated by using ZnO nanowires field emitter arrays.