Micro/nano technology: a solution for next generation multi-function integrated systems

Abstract

The unprecedented technology advancements in miniaturizing integrated circuits, and the resulting plethora of sophisticated, low cost electronic devices demonstrate the impact that micro/nano scale engineering can have when applied only to the area of electrical and computer engineering. Current research efforts in micro/nano fabrication technology for implementing integrated systems hope to yield similar revolutions in engineering fields of biomedical, mechanical, chemical, optical, fluidic, civil and environmental. The integrated system technology requires the integration of multiple materials, phenomena, technologies, and functions at micro/nano scales. By cross linking the individual engineering fields through micro/nano technology, various miniaturized system components have been developed at UCI that will have future impacts in the application markets such as medicine, healthcare, and telecommunications.