Magnetic actuated MOEMS resonant biosensor array

Abstract

A biosensor platform is utilized in liquid for detection of His protein. T-shaped thin film nickel cantilevers are actuated magnetically using self-oscillation principle and the sensing is based on embedded diffraction gratings on the cantilevers with interferometric sensitivity. Experiments are performed in a custom 1ml liquid chamber and 5.7ng/ml detection sensitivity is demonstrated. Method is label-free, robust and allows multiplexing. It also doesn't require any electrical connections to the MEMS sensor chip. Therefore, it is suitable for real-time multi analyte screening using a disposable chip in a portable device.