Efficient wireless power transmission technology based on above-CMOS integrated (ACI) high quality inductors

Abstract

Fully-integrated on-chip inductors with up to 200 nH/mm2 inductance density and a peak qualify factor of 25 are demonstrated based on above-CMOS integration (ACI) post processing techniques. Utilizing a 380-nH ACI inductor, a 2.5×2.5 mm2 wireless energy harvesting antenna was implemented. Measurement results show that it can receive 27 mW from a 250-mW transmitting power source at a distance of 5.3 mm. This represents a 7-fold increase in wireless power transfer efficiency compared to other reported technologies.