CARS DIAGNOSTIC ON A PHOTOCHEMICAL REACTOR FOR IR LASER INDUCED PRODUCTION OF Si AND Si3N4 POWDERS

Abstract

In a flow reactor a low power (up to 50 W) CW CO2 laser tuned at 944,19 cm−1 has been focussed in order to produce Si and Si3N4 ultrafine powders from SiH4 and SiH4/NH3 mixtures.