Experiences with SMIF-integration for semiconductor fabrication

Abstract

SMIF technology for microelectronic production lines is being increasingly used worldwide. A crucial factor for an economical SMIF solution is the planning phase, where experience has shown that the general approach to the project must aim for an integrated solution. It is necessary to pursue the integrated concept right from the beginning of the planning phase in order to achieve a high reliability from a production line with SMIF automation. The main requirement of the philosophy is to provide process tools with integrated SMIF solutions. For the success of the project, process tools including SMIF and minienvironment components must be purchased. The main priority of a SMIF project is to discuss with tool vendors and SMIF/Minienvironment OEM vendors before purchasing the process equipment. This paper describes from experience the procedures, interfaces and requirements necessary to realize a SMIF manufacturing line with a high number of integrated SMIF process tool solutions.