T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin
{"title":"Reduced order modeling and optimization of the magnetic thin film vibrating beam magnetometer","authors":"T. Perrier, R. Lévy, P. Kayser, B. Verlhac, P. Lavenus, J. Moulin","doi":"10.1109/DTIP.2017.7984462","DOIUrl":null,"url":null,"abstract":"This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2017.7984462","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a reduced order model including the resonator and the mechanical moment induced by the thin film on the resonator. The model development is presented as well as its experimental validation with four magnetometer prototypes. This model is then used to investigate the optimization of the thin film position on the resonator as well as the advantages of various shapes of resonators.