{"title":"Optimization of the accelerometer design using ANSYS","authors":"T. Petruk, V. Teslyuk, M. Melnyk","doi":"10.1109/MEMSTECH.2016.7507516","DOIUrl":null,"url":null,"abstract":"This article is aimed and investigated the optimization model of the capacitive accelerometer. To automate the process of research the bisection method has been suggested. Software implementation of the suggested solutions in the form of applications for ANSYS system allowed to automate the process of selecting the thickness of the seismic mass and spring elements accelerometer, so as to obtain the required displacement of the movable plate of the accelerometer.","PeriodicalId":102420,"journal":{"name":"2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSTECH.2016.7507516","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This article is aimed and investigated the optimization model of the capacitive accelerometer. To automate the process of research the bisection method has been suggested. Software implementation of the suggested solutions in the form of applications for ANSYS system allowed to automate the process of selecting the thickness of the seismic mass and spring elements accelerometer, so as to obtain the required displacement of the movable plate of the accelerometer.