Characterization of an electrically induced refractive index change in a hydrogenated amorphous silicon multistack waveguide

Abstract

Electrically induced phase modulation is characterized for the first time in a waveguide-integrated Fabry-Perot (FP) resonating cavity based both on an index- and conductivity high-contrast amorphous silicon/amorphous silicon carbide (a-Si:H/a-SiC:H) multistack.