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Vertical silicon MOSFETs based on selective epitaxial growth

ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386) Pub Date : 2000-10-16 DOI:10.1109/ASDAM.2000.889454
J. Moers, A. Tonnesmann, D. Klaes, L. Vescan, A. van der Hart, A. Fox, M. Marso, P. Kordos, H. Luth
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引用次数: 10
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基于选择性外延生长的垂直硅mosfet
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ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)
ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)
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