Development and Application of Terahertz Optical Sampling Systems for the Semiconductor Industry

Abstract

This paper presents a terahertz (THz) optical sampling technique and discusses some industrial applications in semiconductor manufacturing and failure analysis. The use of ultrashort pulse fiber lasers and specific electro-optical or opto-electrical conversion devices such as photoconductive switches enable time-domain analysis of sub-picosecond pulses, paving the way to new industrial applications.